MONITORING APPARATUS OF NEUTRALIZATION APPARATUS, MONITORING METHOD OF NEUTRALIZATION APPARATUS, AND COMPUTER READABLE RECORDING MEDIUM HAVING A PROGRAM FOR MONITORING NEUTRALIZATION APPARATUS RECORDED

摘要

This invention is in the course of conducting an electrical characteristic test of the semiconductor wafer (W), static electricity charged to the object to be processed monitoring the discharging device to remove a problem with the reliability and to provide a surveillance device of the discharging device that can perform a high electric characteristics inspection. Monitoring apparatus of the discharging apparatus of the present invention (monitoring circuit) 22, a main chuck 14 is moved relative to the probe card, contact the semiconductor wafer (W) and the probe card 15 on the main chuck (14) was in the course of conducting an electrical characteristic test of the semiconductor wafer (W), the discharge switch circuit 21 using the main chuck 14 to the device for monitoring the discharging device (20) to remove the charged static electricity on the semiconductor wafer (W) a discharge switch circuit (21A) and a discharging interlock device 20, and also the detection switch circuit (22A) for detecting a malfunction of the discharge switch circuit (21A), the detection switch circuit (22A) for detecting the drive for opening and closing circuit ( 22B) with, and a decision circuit (22C) for determining the malfunction of the detection switch circuit (22A) through a discharging switch circuit (21A).