Apparatus for measuring thickness change, system using the apparatus, morphology microscope using the apparatus, method for measuring thickness change, and method for acquiring morphology image using the method

摘要

The present invention is inexpensive and simple configuration changes and precise microscopic thickness that can be measured accurately measuring thickness change device , using this system , to the surface of the image pickup surface method using a microscope, and this thickness variation measuring method using the same , and a light source that can irradiate the beam on the object to be measured , can be reflected when the incident beam is reflected by the measurement object and that the reflector surface , which includes a can sensing the reflected beam from the sensing surface reflector , thickness variation measurement device , a system using the same surface using the same microscope , thickness variation provides a surface measurement method using the image pickup method , and this . ;