The Metal Grid Module for detecting THz wave and Manufacturing Method thereof

摘要

PURPOSE: A metal grid module for detecting a THz wave and a manufacturing method thereof are provided to supply a metal grid integrated on a photosensitive glass frame. CONSTITUTION: A fixed region inside a photosensitive glass is photosensitized so that only a photosensitive glass frame(210a) of a photosensitive glass is left. A photo resist is formed on the photosensitive glass frame. UV is applied to the fixed region of the photo resist. A grid pattern with a fixed grid period is formed on the photosensitive glass frame. A metal grid(250) is formed between the formed grid patterns.