首页> 外国专利> METHOD FOR TRANSFERRING MICRO CIRCUITS CAPABLE OF RAPIDLY TRANSFERRING A PLURALITY OF MICRO CIRCUITS AT ONCE AND AN APPARATUS THEREOF

METHOD FOR TRANSFERRING MICRO CIRCUITS CAPABLE OF RAPIDLY TRANSFERRING A PLURALITY OF MICRO CIRCUITS AT ONCE AND AN APPARATUS THEREOF

机译:一次能够迅速转移多个微电路的微电路的转移方法及其装置

摘要

PURPOSE: A method for transferring micro circuits and an apparatus thereof are provided to transfer a final substrate with a plurality of micro circuits formed on a microcircuit substrate having a micro interval using different pitches and patterns at once.;CONSTITUTION: A first UV light irradiation module(120) is arranged on a lower portion of a microcircuit substrate carriage(110). UV light generated from the first UV light irradiation module is irradiated onto a first UV film(B1). A pickup roll(140) is arranged on the top of the microcircuit substrate carriage while being separated at a certain interval. An UV film supply roll(150) is placed at a rear portion of the pickup roll. An UV film discharge roll(160) is placed at a front portion of the pickup roll.;COPYRIGHT KIPO 2013
机译:目的:提供了一种转移微电路的方法及其设备,用于转移具有多个微电路的最终基板,该最终微基板一次形成在微电路基板上,该微电路具有微间距,使用不同的间距和图案一次。模块(120)布置在微电路基板托架(110)的下部。从第一UV光照射模块产生的UV光照射到第一UV膜(B1)上。拾取辊(140)布置在微电路基板托架的顶部,同时以一定间隔分开。将UV膜供应辊(150)放置在拾取辊的后部。将紫外线薄膜排放辊(160)放置在捡拾辊的前部。; COPYRIGHT KIPO 2013

著录项

  • 公开/公告号KR101184404B1

    专利类型

  • 公开/公告日2012-09-20

    原文格式PDF

  • 申请/专利权人 IES CO. LTD.;

    申请/专利号KR20120089003

  • 发明设计人 OH JUNG WHO;

    申请日2012-08-14

  • 分类号H01L21/027;

  • 国家 KR

  • 入库时间 2022-08-21 17:07:29

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