CLEAN ROOM FACILITY, AIR VOLUME CONTROL DEVICE, AND AIR VOLUME CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To provide clean room facilities, an air volume control device, and an air volume control method that can save energy more than before.;SOLUTION: There are provided clean room facilities 100 that include a clean room 50 and can control an air volume of air supplied to the clean room 50, the clean room facilities including a dust sensor 12 for measuring the number of pieces of dust in the clean room 50, a temperature sensor 13 for measuring the temperature in the clean room 50, a fan 15 for supplying air into the clean room 50, and an air volume control section 14 for determining the air volume of air supplied into the clean room 50 based upon the number of pieces of dust in the clean room 50 measured by the dust sensor 12 and the temperature in the clean room 50 measured by the temperature sensor 13, and controls the fan 15 so as to obtain the determined air volume.;COPYRIGHT: (C)2013,JPO&INPIT