IMPURITY CONTAMINATION EVALUATION METHOD FOR ENVIRONMENTAL ATMOSPHERE

摘要

PROBLEM TO BE SOLVED: To provide means for evaluating phosphor in an environmental atmosphere with high accuracy.;SOLUTION: An impurity contamination evaluation method for an environmental atmosphere includes ventilating atmospheric gas sampled from an evaluation target atmosphere through a hydrogen peroxide-containing aqueous solution to collect an evaluation target impurity containing phosphor in the aqueous solution, irradiating the hydrogen peroxide-containing aqueous solution after the ventilation with ultraviolet rays, subjecting the hydrogen peroxide-containing aqueous solution irradiated with ultraviolet rays to inductive coupling plasma mass analysis to quantify the evaluation target impurity, and evaluating the presence/absence of the evaluation target impurity contamination in the evaluation target atmosphere and the degree of the contamination with a result of the quantification as an index.;COPYRIGHT: (C)2013,JPO&INPIT