PROBLEM TO BE SOLVED: To exchange a substrate on a substrate stage quickly.;SOLUTION: A substrate stage 20a carries a substrate P1 from a substrate holder 30a in a manner that a pressure gas is jetted from the substrate holder 30a to float the substrate P1 and the substrate P1 is moved along a horizontal plane using a top surface (substrate mount surface) of the substrate holder 30a as a guide plate with the use of a substrate carry-out device 70a housed in the substrate holder 30a. Thus, the carry-out operation of the substrate P1 can be started after the exposure process on the substrate P1 ends and before the substrate stage 20a is positioned at a substrate exchange position for the exchange of the substrate P1. During the carry-out operation of the substrate P1, another substrate P2 which is subjected to the exposure next, stands by above the substrate holder 30a. After the end of the carry-out operation of the substrate P1, the substrate P2 is conveyed to a plurality of substrate lift devices 46a of the substrate stage 20a.;COPYRIGHT: (C)2013,JPO&INPIT
展开▼