Standard reference material creation manner, and standard reference material

摘要

PPROBLEM TO BE SOLVED: To provide a more ideal standard sample for resolution evaluation of a charged particle beam device. PSOLUTION: A sample preparation method for the charged particle device includes a step of forming fine irregularities on the surface of a substrate, a step of dripping on the substrate colloid metal or metal fine particles dispersed in an ionic liquid, and a step of removing the solution dripped on the substrate. Also, the sample preparation method for the charged particle device includes a step of forming fine irregularities on the surface of the substrate and a step of attaching metal fine particles on the surface of the substrate by sputtering. PCOPYRIGHT: (C)2011,JPO&INPIT