Manufacturing apparatus for depositing a material onto a carrier, and the electrode used with the manufacturing equipment. Manufacturing apparatus comprises a housing defining a chamber. Inlet housing and defines an outlet for discharging gas from the chamber for introducing into the chamber a gas. Are arranged one electrode through the housing, at least, the electrodes are disposed within the housing at least partially. Electrode has an outer surface. Outer surface having a contact region that is adapted to contact the socket. The contact area of the electrode, the contact region coating to maintain the conductivity between the electrode and the socket is disposed. And a conductivity of 106 Siemens / meter 7 × least at room temperature, the contact region coating, wear resistance greater than nickel: (measured unit 3 / N · m mm).
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机译：用于将材料沉积到载体上的制造设备以及与该制造设备一起使用的电极。制造设备包括限定腔室的壳体。入口壳体并限定用于从腔室排放气体以将气体引入腔室的出口。至少一个电极穿过壳体布置，电极至少部分地布置在壳体内。电极具有外表面。外表面具有适于与插座接触的接触区域。设置电极的接触区域，接触区域涂层以保持电极和插座之间的导电性。并且 106 Siemens的电导率/米至少在室温下为7×，接触区涂层，耐磨性大于镍：（测量单位3 / N ·m mm） 。
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