Being the teacher data preparation manner which creates the teacher data which is used for the study of the sortable

摘要

PROBLEM TO BE SOLVED: To speedily and appropriately determine the category of a defective image utilized for teacher data when creating the teacher data used for learning of a sorter for sorting defects on a substrate.;SOLUTION: One kind of feature amount U_x is acquired from a target defective image 7 having an undetermined category, and one kind of feature amount, namely T_x11, T_x12, T_x21, is acquired from typical images 811, 812, 821 indicating typical defects of two categories 81, 82. Then, three feature amount differences between the feature amount U_x and the feature amount T_x11, T_x12, T_x21 is obtained, and one vote is casted for the category 81 to which the typical image 811 having the smallest feature amount difference belongs. The similar processing is performed to the remaining types of feature amount, and the category 81 having the largest number of votes obtained in the categories 81, 82 is determined to be a category to which the target defective image 7 belongs. In this manner, by casting votes by obtaining the feature amount difference for each type of feature amount, the category of the target defective image is determined speedily and appropriately.;COPYRIGHT: (C)2010,JPO&INPIT