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Photoresist stripper composition and photoresist method of peeling using this
Photoresist stripper composition and photoresist method of peeling using this
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机译:光致抗蚀剂剥离剂组合物和使用该剥离剂的光致抗蚀剂剥离方法
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摘要
The present invention relates to photoresist stripping composition. More specifically, by including a compound represented by Formula 1, the peeling capability of the photoresist is excellent, photoresist stripping composition according to the invention, if the molybdenum (Mo) is included in the photo resist lower layer corrosion prevention force against the bottom photoresist film is also excellent.
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