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Photoresist stripper composition and photoresist method of peeling using this

机译:光致抗蚀剂剥离剂组合物和使用该剥离剂的光致抗蚀剂剥离方法

摘要

The present invention relates to photoresist stripping composition. More specifically, by including a compound represented by Formula 1, the peeling capability of the photoresist is excellent, photoresist stripping composition according to the invention, if the molybdenum (Mo) is included in the photo resist lower layer corrosion prevention force against the bottom photoresist film is also excellent.
机译:本发明涉及光致抗蚀剂剥离组合物。更具体地,通过包含式1表示的化合物,如果在光致抗蚀剂下层中包含钼(Mo)对底部光致抗蚀剂的防腐蚀力,则光致抗蚀剂的剥离能力优异,根据本发明的光致抗蚀剂剥离组合物。电影也很出色。

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