The sensor component null which at least possesses one which possesses piezoelectric property and pyro electric property measurement

摘要

This invention, having possessed with piezoelectric quality and pyro electric quality, and the sensor element which possesses one which has the plural measuring electrodes measurement element (2) at least regards (1). At least, measuring fixed quantity and the noise factor quantity operate simultaneously in one measurement element (2), at the same time the measurement signal which is led from the plural measuring electrodes (3) has had noise. As for the sensor element (1), one compensating element (4,4 ') having possessed at least, the compensating element (4,4 '), just the noise factor quantity operating, the compensating element (4,4 ') from, the revision signal which is useful for the noise factor compensation in the measurement signal is induced. This invention creates thermal contact alongside the part where (2) extends to longitudinal direction the compensating element (4,4 '), the measurement element (2) the 1st measurement element support section (10) with the 2nd measurement element support section (11) vis-a-vis, or vis-a-vis the measurement element (2), both measurement element support section (10,11) the measurement element between, the measurement element (2) and the aforementioned compensating element (4,4 ') inside, features that the almost same temperature range occurs.