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Method for making a patterned perpendicular magnetic recording disk having a FePt or CoPt chemically ordered recording layer

机译:具有FePt或CoPt化学有序记录层的图案化垂直磁记录盘的制造方法

摘要

A method for making a bit-patterned-media (BPM) magnetic recording disk includes depositing a FePt (or CoPt) alloy recording layer, and then depositing a sealing layer on the FePt layer before high-temperature annealing. The high-temperature annealing causes the FePt to become substantially chemically-ordered in the L10 phase. After annealing, the sealing layer is removed. The sealing layer prevents nanoclustering and agglomeration of the FePt material at the surface of the FePt layer and the sealing layer, which would result in undesirable high surface roughness of the FePt, making patterning of the FePt layer difficult. The FePt layer can be patterned into the discrete islands for the BPM disk either before deposition of the sealing layer or after deposition and removal of the sealing layer. After patterning and removal of the sealing layer, the disk protective overcoat is deposited over the discrete data islands.
机译:一种用于制造位图案介质(BPM)磁记录盘的方法,包括沉积FePt(或CoPt)合金记录层,然后在高温退火之前在FePt层上沉积密封层。高温退火导致FePt在L1 0 相中变得基本化学有序。退火后,去除密封层。密封层防止FePt材料在FePt层和密封层的表面处的纳米团簇和团聚,这将导致FePt的不期望的高表面粗糙度,使得FePt层的图案化困难。可以在沉积密封层之前或在沉积和去除密封层之后,将FePt层图案化为BPM盘的离散岛。在图案化并去除密封层之后,将磁盘保护保护层沉积在离散的数据岛上。

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