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Template-registered diblock copolymer mask for MRAM device formation
Template-registered diblock copolymer mask for MRAM device formation
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机译:用于MRAM器件形成的模板注册的二嵌段共聚物掩模
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摘要
A device comprising a diblock copolymer mask for fabricating a magnetoresistive random access memory (MRAM) includes a magnetic layer; a mask formed on the magnetic layer; a template formed on the mask; and the diblock copolymer mask, the diblock copolymer mask comprising a first plurality of uniform shapes formed on and registered to the template.
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