Apparatus and method for transferring solar cell wafers into a liquid bath, wherein the wafers are separated in the liquid bath with micro bubbles

摘要

A wafer separating apparatus which suppresses breakage and the like of wafers at the time of separating and transferring the wafers. The wafer separating apparatus is provided with: a cassette (12), which houses a plurality of wafers (W) formed into sheets such that the wafers are housed upright and tightly close to each other, and at least vertically releases the wafers; a cassette supporting body (13) which removably supports the cassette and at least vertically releases the cassette; a lift apparatus (14) which lifts the cassette supporting body with the cassette; a liquid bath (16) which contains a liquid in which the cassette supporting body is immersed with the cassette when the lift apparatus is brought down; a nozzle (17) which is arranged in the liquid bath and jets fine bubbles from below the cassette supporting body toward the wafers; and a fine bubble generating apparatus (18) which generates the fine bubbles to be jetted from the nozzle.