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PROCEDURE OF 2D AND 3D OPTICALLY ASSISTED FOUNTAIN PEN NANOLITHOGRAPHY AND APERTURE PEN NANOLITHOGRAPHY
PROCEDURE OF 2D AND 3D OPTICALLY ASSISTED FOUNTAIN PEN NANOLITHOGRAPHY AND APERTURE PEN NANOLITHOGRAPHY
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机译:2D和3D光学辅助笔纳米照相术和光圈笔纳米照相术的程序
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摘要
The invention refers to a procedure of 2D and 3D optically assisted fountain pen and aperture pen nanolithography that deposits ink (1) through a cantilever (2) having a perforated tip onto a substrate (4), the cantilever (2) having a channel inside it and being fed with ink (1) by the microfluidic chip (6), the deposition of ink (1) being made under illumination with light from beam (5). The light beam (5) has the role of either photopolymerize ink (1) when ink (1) is a photopolymerizable monomer or to accelerate the evaporation of the solvent that enters into composition of ink (1).
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