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INERTIA FORCE SENSOR AND COMPOSITE SENSOR FOR DETECTING INERTIA FORCE
INERTIA FORCE SENSOR AND COMPOSITE SENSOR FOR DETECTING INERTIA FORCE
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机译:惯性力传感器和用于检测惯性力的复合传感器
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摘要
An inertia force sensor includes a detection element having an acceleration detection section (1). This detection element (1) has: two orthogonal arms obtained by connecting first arms (8) to second arms (10) so as to be orthogonal to each other, a support section (12) for supporting one ends of the two first arm (8), a fixation section (4) connected to the other ends of the two first arms (8), and weight sections (2) fixed to tip ends of the second arms (10). The first arm (8) has a thickness thinner than thicknesses of the second arm (10) and weight section (2) to thereby provide an increased detection sensitivity.
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