CASSETTE FOR RECEIVING A SUBSTRATE CAPABLE OF REMOVING CONTAMINANTS FROM AN INNER SPACE OF THE CASSETTE

摘要

PURPOSE: A cassette for receiving a substrate is provided to prevent the penetration of contaminants from the outside by closely bonding a door to a cassette body with a dual bonding using a pin unit and a magnetic part.;CONSTITUTION: A moving unit(150) includes a movable shaft(151) which horizontally or vertically moves with respect to a door. A gear part(160) is combined with the moving unit. A driving lever(170) rotates the gear part. A pin guide unit(180) is combined with the moving unit and includes a pin shaft(181), a guide pin(183), and a safe pin(184).;COPYRIGHT KIPO 2013