EXPOSURE APPARATUS CAPABLE OF COMPENSATING A FOCAL DISTANCE DIFFERENCE BETWEEN VISIBLE RAYS AND ULTRAVIOLET RAYS

摘要

PURPOSE: An exposure apparatus is provided to maintain the precision of a desirable pattern by preventing deviation due to an alignment process and an exposure process.;CONSTITUTION: An exposure apparatus(100) transmits light to a substrate arranged on a stage via an imaging lens(130) and an electronic display with a pattern. The exposure apparatus includes an optical source, the electronic display, the imaging lens, the stage, and a focus control panel(150). The focus control panel makes a focal distance of visible rays via the imaging lens equal to or similar to a focal distance of ultraviolet rays via the imaging lens if the optical source uses the visible rays.;COPYRIGHT KIPO 2013