LASER PROCESSING APPARATUS USING THE SINGLE PHOTON ABSORPTION OF AN ULTRA-SHORT PULSE LASER, CAPABLE OF QUICKLY AND PRECISELY PROCESSING A TARGET POINT WITHOUT CRACKS OR CHIPPING THROUGH CONTINUOUS PROCESSING

摘要

PURPOSE: A laser processing apparatus using the single photon absorption of an ultra-short pulse laser is provided to raise the pulse repetition rate of an ultra-short pulse laser light source with MHz unit, thereby minimizing the dispersion of a laser light when the laser light is focused on a focal point without non-linearity.;CONSTITUTION: A laser processing apparatus using the single photon absorption of an ultra-short pulse laser includes a work stage(110), an ultra-short pulse laser light source(120), a scanner(130), and a controlling part(140). The ultra-short pulse laser light source at the work stage raise pulse repetition rate on the surface of a work-piece(A) with MHz unit in order to induce the single photon absorption. The scanners are respectively placed at the front and the rear of a processing direction based on a laser light irradiated to the surface of the work-piece, and measure the surface height variation of the work-piece on a chuck table. The controlling part receives the data of the surface height variation from the scanners, and controls the focal position of the laser light in real time in order to form a modified area inside the work-piece separated from the surface of the work-piece at a certain distance.;COPYRIGHT KIPO 2013