METAL MOLD FOR USE IN IMPRINTING PROCESSES

摘要

The present invention is the fluorinated alkyl phosphoric acid derivative or fluorinated alkyl poly including a phosphorus atom and the alkyl chain - relates to a novel metal mold with the anti-adhesive properties comprising a base metal mold, and wherein the adhesive layer containing a phosphoric acid derivative. Wherein the adhesive layer is bonded directly to the surface of the non-metallic mold. Non-metallic, for example, may be a nickel, wherein the fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative is a phosphonic acid, phosphinic acid, phosphonate and phosphonate salts, phosphinates and phosphinate salts , or may be those selected from the group consisting of each oligomer, the phosphorus atom is coupled directly to the alkyl chain. ;