VACUUM PLATE OF A LARGE-AREA THIN FILM COATING DEVICE CAPABLE OF IMPROVING ECONOMICAL EFFICIENCY AND A PROCESSING METHOD THEREOF

摘要

PURPOSE: A vacuum plate of a large-area thin film coating and a processing method thereof are provided to obtain a thin vacuum plate by minimizing thickness.;CONSTITUTION: Vacuum adsorption holes (100a) of fine diameter are formed on the surface of a plate body (100). An air discharge channel (120) is formed on one side of the plate body. The air discharge channel is connected to each air suction channel (110). Caps (112) cover the inlets (111) of the air suction channels. Heaters (130) are inserted into each lower part between the air suction channels.;COPYRIGHT KIPO 2013