Optical arrangement of illumination device of micro-lithographic projection exposure system, converts input polarization distribution of light into desired output polarization distribution due to Faraday rotation of optical element

摘要

The polarization-influencing optical arrangement has generating unit for generating a magnetic field in the region of a transmissive optical element (200). A given input polarization distribution of incident light is converted into a desired output polarization distribution due to Faraday rotation of the transmissive optical element, during operation of the optical system. The transmissive optical element is provided with a spherical optical effective area. Independent claims are included for the following: (1) an illumination device; and (2) method for micro-lithographic manufacture of micro-structured components.