Method for manufacturing solar cell e.g. interdigitated-back contact solar cell, involves cleaning cell substrate, and diffusing boron from boron source layer and diffusing phosphorus into solar cell substrate in common diffusion step

摘要

The method involves cleaning (10) an n-type-solar cell substrate (50), and subsequent forming of a boron source layer (52) at a temperature of less than 650 degree Celsius on a part of a surface (51) of the solar cell substrate. Boron is diffused from the boron source layer and phosphorus is diffused into the solar cell substrate in a common diffusion step (18). The boron source layer is formed on a rear side of the solar cell substrate. A solar cell is formed as a back contact solar cell (100). An emitter (66) of the solar cell is located on the rear side of the solar cell substrate. The solar cell substrate is an n-type-solar cell substrate.