Method for detection of bubbles formed during reaction in liquid medium or during injection of gas in liquid medium, involves providing semiconductor channel, and capacitively connecting tank with channel

摘要

The method involves detection of fluctuation current between a source electrode (6) and a drain electrode (7) of an ion-sensitive FET (IS-FET) (4). A semiconductor channel (5) of the IS-FET is located below a tank (3) in which a liquid medium is placed, where the tank is capacitively connected with the channel. The tank has dimensions lower than 5mm. The channel is covered with an electrically insulating material layer. A cathode (9) and an anode (12) are arranged in the layer.