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The new germanium compound which designates the amidine derivative as the ligand and the germanium compound which is displayed
The new germanium compound which designates the amidine derivative as the ligand and the germanium compound which is displayed
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机译:指定the衍生物为配体的新型锗化合物和所显示的锗化合物
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摘要
Provided is a germanium complex represented by Chemical Formula 1 wherein Y1 and Y2 are independently selected from R3, NR4R5 or OR6, and R1 through R6 independently represent (Ci-C7) alkyl. The provided germanium complex with an amidine derivative ligand is thermally stable, is highly volatile, and does not include halogen components. Therefore, it may be usefully used as a precursor to produce high-quality germanium thin film or germanium-containing compound thin film by metal organic chemical vapor deposition (MOCVD) or atomic layer deposition (ALD).
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