BOLOMETER DETECTOR FOR ELECTROMAGNETIC EMISSION IN A TERAHERTZ REGION AND ARRAY DETECTION DEVICE INCLUDING THE DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a bolometer detector that aims at detection of electromagnetic emission in a terahertz region and is equipped with an antenna.SOLUTION: A terahertz detection device includes: at least one terahertz antenna; a detection microbridge that is bridged over a substrate, and includes a resistance load connected to the antenna and a resistance bolometer element connected to the resistance load; and a bias circuit for biasing the bolometer element. Furthermore, the device includes: a skimming microbridge that is bridged over the substrate, includes the resistance bolometer element and is substantially identical to the detection microbridge; a reflective metal layer that faces the skimming microbridge in order to obtain counteracting interference for a terahertz wavelength at a skimming microbridge level; a bias circuit for electrically biasing the bolometer element in the skimming microbridge; and a read circuit for measuring a difference between electric signals of the microbridge.