Laser processing method, laser processing method using circularly polarized light vortex laser beam, method for producing member having needle-like body, and member having needle-like body

摘要

PPROBLEM TO BE SOLVED: To provide a laser beam machining method in which debris left unsublimated on a machining surface by ablation can be cleaned simultaneously with the ablation and in which no HAZ is caused in a workpiece. PSOLUTION: In the laser beam machining method (a method of performing ablation on a workpiece using a laser beam), the laser beam is pulsed light of optical vortex laser beam, wherein the pulse width of the pulsed light is 10 pico-to 100 nano-seconds. In this laser beam machining method, the laser beam used is the pulsed light of circularly polarizing/optical vortex laser beam in which the rotating direction of the circularly polarized light is the same as that of the optical vortex laser beam, wherein the circularly polarizing/optical vortex laser beam in use has the pulse width of the pulsed light ranging from 10 pico-to 100 nano-econds. PCOPYRIGHT: (C)2011,JPO&INPIT