Uses tunnel electric current detection the minute electric machine system which (MEMS) is made the base to calibrate the sensor which manner in order and uses

摘要

PROBLEM TO BE SOLVED: To control tunneling current between a first element 40a and a second element 40b, in a microelectromechanical system (MEMS).;SOLUTION: This system is equipped with a tunneling current excitating source 50 for supplying a tunneling current between each element, and a tunneling current monitor 52 for monitoring the change in the tunneling current, in response to movement of at least one element. The system is also equipped with a positioning device 86 for positioning at least one of each element; and a control device 88 that is in communication with the tunneling current monitor for controlling the positioning device to position at least one of each element at a first spacing, between each element for configuring the system in a referencing mode; and to position each element at a second spacing for configuring the system in a sensing mode, whereby the system is calibrated with respect to the referencing mode.;COPYRIGHT: (C)2008,JPO&INPIT