An apparatus and a method for manufacturing sheet with a thin film of the thin film with a sheet, as well as cylindrical roll used in these

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for producing a sheet with a thin film in which when a first thin film is formed on one surface of a sheet and then a second thin film is also formed on the other surface thereof, even a relatively thick metal thin film or metal oxide thin film having a thickness of 50 [nm] or more can be produced at high speed without heat deformation.;SOLUTION: The method for producing a sheet with a thin film includes bringing a sheet 1 into contact with a surface 3 of a cylindrical roll under a reduced-pressure atmosphere, a first thin film 13 being formed on one of the surfaces of the sheet 1, and allowing metallic vapor 10 to fly towards the sheet from an evaporation source 7 onto the sheet conveyed with the rotational movement of the cylindrical roll, thereby continuously forming a second thin film 14 on the sheet. In this case, the surface of the cylindrical roll is covered with an insulator layer 20 having a volume resistance of 10⁸ to 10¹¹cm. The second thin film is formed on the other surface of the sheet by applying a voltage of 100 to 400 V between the surface on which the first thin film is formed and the cylindrical roll.;COPYRIGHT: (C)2011,JPO&INPIT