METHOD OF MANUFACTURING TUNNEL BARRIER LAYER OR GATE INSULATOR FILM AND APPARATUS FOR MANUFACTURING TUNNEL BARRIER LAYER OR GATE INSULATOR FILM

摘要

It is an object of the present invention to provide a method of and an apparatus for manufacturing a tunnel barrier layer or a gate insulator film with good film quality and film thickness uniformity. The present invention is characterized in that, a shield is configured to shield a region of a substrate to which an erosion region of a target is projected along a normal from a surface of the target and sputtered particles are configured to deposit on the substrate linearly moved when passing through an opening formed in the shield.