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CONFOCAL OPTICAL INSPECTION APPARATUS AND CONFOCAL OPTICAL INSPECTION METHOD

机译:共焦光学检查装置和共焦光学检查方法

摘要

The confocal optical inspection apparatus that acquires a confocal image of an object and inspects the object includes a light source that emits illumination light; a first opening member that divides the illumination light emitted from the light source into illumination light beams, the first opening member having openings; an imaging device that acquires an image according to the respective illumination light beams reflected by the object; and an information processor that acquires a corrected confocal image in which distortion of an optical transmission path of the confocal optical inspection apparatus is removed from a time delayed integration (TDI) image obtained by a TDI operation of the imaging device, using a pre-measured point spread function (PSF) indicating optical characteristics of the confocal optical inspection apparatus.
机译:共聚焦光学检查设备,其获取对象的共焦图像并检查该对象,该共聚焦光学检查设备包括发射照明光的光源。第一开口构件将从光源发出的照明光分成照明光束,第一开口构件具有开口。成像装置,其根据被物体反射的各个照明光束来获取图像。信息处理器和信息处理器,其使用预先测量的方法从通过成像装置的TDI操作获得的时延积分(TDI)图像中去除共焦光学检查设备的光传输路径的失真的校正共焦图像。指示共焦光学检查设备的光学特性的点扩展函数(PSF)。

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