Functional device array with self-aligned electrode structures and fabrication methods thereof

摘要

A functional device array with self-aligned electrode structures and fabrication methods thereof are presented. The functional device array includes a transparent substrate. A patterned lower electrode array is disposed on the transparent substrate. A spacer structure is disposed overlying the transparent substrate and located between the patterned lower electrodes self-aligned therewith. A functional structure layer is disposed in an array of pixel regions defined by the spacer structure. A patterned upper substrate is disposed on the functional structure layer corresponding to each of the pixel regions, and a passivation layer is disposed on the patterned upper electrode covering the functional device array.