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Piezoelectric actuator including double PZT piezoelectric layers with different permitivities and its manufacturing method
Piezoelectric actuator including double PZT piezoelectric layers with different permitivities and its manufacturing method
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机译:包括具有不同介电常数的双pzt压电层的压电致动器及其制造方法
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摘要
In a piezoelectric actuator including a lower electrode layer, a first PZT piezoelectric layer having a first relative permittivity is formed on the lower electrode layer, and a second PZT piezoelectric layer having a second relative permittivity smaller than said first relative permittivity is formed on the first PZT piezoelectric layer.
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