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Material measures for use in evaluating performance of measuring instrument for measuring surface texture
Material measures for use in evaluating performance of measuring instrument for measuring surface texture
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机译:用于评估用于测量表面纹理的测量仪器性能的主要措施
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摘要
A material measure for use in evaluating the performance of a measuring instrument for measuring surface texture includes: a measurement area having a plurality of grooves in a predetermined direction. With the configuration, each of the grooves has a simple cross-sectional shape at a cross-section along the predetermined direction; and a length of the cross-sectional shape in the predetermined direction is different for the predetermined number of adjacent grooves in the predetermined direction.
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