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DEVICE FOR ULTRA-PRECISE POSITIONING OF AN ELEMENT AND POSITIONING SYSTEM COMPRISING SUCH A DEVICE
DEVICE FOR ULTRA-PRECISE POSITIONING OF AN ELEMENT AND POSITIONING SYSTEM COMPRISING SUCH A DEVICE
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机译:用于超精密定位的设备以及包括此类设备的定位系统
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摘要
The invention relates to a device (1) for ultra-precise positioning of an element, and to a system comprising this device. The device (1) comprises: a body (2); a plurality of flexible polymer panels (31, 32, 33, 34) fixed to the body (2), pairs of these panels lying, when they are at rest, perpendicular to each another; two rods (25, 26), each connecting the body (2) to an associated flexible panel (31, 32), each rod passing through the centre of the panel and perpendicularly to this panel so that the rods (25, 25) lie perpendicular to each other; the flexible panels (31, 32, 33, 34) opposite each other relative to the body (2) thus being able to accompany the associated rod (25, 26) when this rod is made to move in translation in the direction of its longitudinal axis.
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