首页> 外国专利> SUBSTRATE TRAY FOR THIN LAYER DEPOSITION AND THIN LAYER DEPOSITION APPARATUS HAVING THE SAME

SUBSTRATE TRAY FOR THIN LAYER DEPOSITION AND THIN LAYER DEPOSITION APPARATUS HAVING THE SAME

机译:具有相同厚度的薄层沉积的基板托盘和薄层沉积装置

摘要

The present invention provides a substrate tray for depositing a thin film and a thin film depositing apparatus including the same. Wherein, the substrate tray includes a tray body which includes an opening part which exposes the deposition surface of a substrate in the center thereof, a support plate which divides the opening part into an exposing area and a blocking area and supports the substrate loaded on the tray body, a cover plate which covers the support plate by interposing the substrate, and a means for closely bonding the substrate to the support plate and the cover plate.
机译:本发明提供一种用于沉积薄膜的基板托盘和包括该基板托盘的薄膜沉积设备。其中,基板托盘包括托盘主体,该托盘主体包括:开口部分,该开口部分在其中心处暴露基板的沉积表面;支撑板,该支撑板将该开口部分分为暴露区域和阻挡区域,并且支撑装载在基板上的基板。托盘主体,通过插入基板覆盖支撑板的盖板,以及将基板紧密结合到支撑板和盖板的装置。

著录项

  • 公开/公告号KR20140017860A

    专利类型

  • 公开/公告日2014-02-12

    原文格式PDF

  • 申请/专利权人 LIGADP CO. LTD.;

    申请/专利号KR20120084543

  • 发明设计人 KIM YOUNG HAK;KIM HYO JU;

    申请日2012-08-01

  • 分类号H01L51/56;

  • 国家 KR

  • 入库时间 2022-08-21 15:43:42

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