METHOD FOR PRODUCING INDIA OXIDE LAYERS PRODUCED BY THIS METHOD AND INDIA OXIDE LAYERED METHODS

摘要

1. A liquid-phase method for producing layers containing indium oxide from an anhydrous solution, characterized in that the anhydrous composition containing at least one indium-halogen-alkoxide of the general formula InX (OR), where R is an alkyl and / or alkoxyalkyl radical and X is F, Cl, Br or I, and at least one solvent or dispersion medium in the sequence of steps a) to d) in an anhydrous atmosphere a) is applied to the substrate, b) the composition deposited on the substrate is irradiated with electromagnetic radiation with a wavelength of ≤360 nm and ) if necessary, it dries and MD) is thermally converted into a layer comprising indiya.2 oxide. The method according to claim 1, characterized in that the alkyl or alkoxyalkyl radicals of at least one indium halogen alkoxide are C1-C15 alkoxy or alkoxyalkyl groups. The method according to claim 2, wherein the indium halogen alkoxide is InCl (OMe), InCl (OCHCHOCH), InCl (OEt), InCl (OiPr) or InCl (OtBu). The method according to claim 1, characterized in that the anhydrous composition along with indium halogen alkoxide also has other precursors, preferably alkoxides and halogen alkoxides of other elements, particularly preferably alkoxides and halogen alkoxides B, Al, Ga, Ge Sn, Pb, P, Zn and Sb, dissolved or dispersed. 5. The method according to claim 1, characterized in that indium-halogen-alkoxide InX (OR) is used with a content of from 0.1 to 10%, calculated on the total weight of the composition. The method according to claim 1, characterized in that the solvent or dispersion medium is an aprotic or weakly protonic solvent or dispersion medium. The method according to claim 6, characterized in that at least one solvent or dispersion medium is methanol, ethanol, isopropanol, tetrahydride