Microelectromechanical structure for out-of-plane acceleration sensor, has substrate, testing mass suspended over substrate and armature fastened on substrate, where testing mass reacts to acceleration

摘要

The microelectromechanical structure has a substrate (104), a testing mass (102) suspended over the substrate and an armature (106) fastened on the substrate. The testing mass reacts to acceleration and inclines with respect to a rotational axis of a moving mass. The moving mass is present in the plane of the testing mass. The anchor is coupled to support the testing mass. Multiple elastic elements are coupled between the anchor and the testing mass. The geometry and design of the multiple elastic elements are set to reduce a displacement of the testing mass caused by thermomechanical stress. Two electrodes are fastened on two opposite sides of the rotational axis of the moving mass at the substrate. An independent claim is included for a method for compensating thermomechanical stress accumulated in a microelectromechanical structure.