DROPLET DISCHARGE STATE CONFIRMATION DEVICE, DROPLET DISCHARGE STATE CONFIRMATION METHOD, AND DROPLET COATING APPARATUS USING THE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a droplet discharge state confirmation device that enables a discharge state of a droplet discharged out of each nozzle of a coating head to be accurately confirmed from an image obtained by camera imaging.;SOLUTION: The droplet discharge state confirmation device, which has a camera 20 imaging a droplet discharged out of each nozzle 12 of a coating head 10 with an array of a plurality of nozzles that discharge solution droplets and image providing means that provides an image including a flight trace of a droplet discharged out of each nozzle 12 obtained by imaging with the camera 20 as information representing a discharge state of the droplet, has such a constitution that a depth of field of the camera 20 is set, in an optical axis direction of the camera 20, at a distance within a range of more than 1 time or less than 2 times the distance between an outer marginal part of a nozzle positioned closest to the camera 20 closest to the camera and an outer marginal part of a nozzle positioned farthest from the camera 20 farthest from the camera.;COPYRIGHT: (C)2015,JPO&INPIT