ION BEAM PROCESSING OBSERVATION DEVICE AND ION BEAM PROCESSING OBSERVATION METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an ion beam processing observation technique which allows for observation of the processed part of a sample, by processing the sample with an ion beam extracted from the same ion source, in a technique for observing the cross-section of an electronic component.;SOLUTION: An ion source capable of switching a gas ion beam species for processing a sample and a gas ion beam species when observing a sample includes at least two introduction systems including gas cylinders 53, 54, gas piping, gas volume adjustment valves 59, 60 and stop valves 57, 58. In each gas system, the gas pressure conditions in a vacuum container can be set, respectively, by means of each gas volume adjustment valve, and a pyramid structure of atoms is formed at the emitter tip, by switching the gas to be introduced in the vacuum container, by operating the stop valve of each gas system.;COPYRIGHT: (C)2015,JPO&INPIT