Switching type multi-perspective detector, optical system for switching type multi-perspective detector, and operation method of switching type multi-perspective detector

摘要

A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement (220) having at least two detection elements (222) with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics (200) configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate (201) and at least a first inner aperture openings (202) in the aperture plate, and at least one second radially outer aperture opening (204) in the aperture plate, wherein the first aperture opening has a concave shaped portion, particularly wherein the first aperture opening has a pincushion shape.