Cross-sectional shape estimation method and cross-sectional shape estimation apparatus.

摘要

The present invention is a cross-sectional shape estimating method for samples being inspected and has a fitting step (s102) for fitting a plurality of shape models (200) to cross-sectional shape data (100) for a sample being inspected (307) and a selection step (s104) for selecting at least one shape model as an optimal model from the plurality of shape models on the basis of error function values, which are an index of the precision of fitting models for the fitting in the fitting step. Thus, when measurement data acquired by cross-sectional SEM, TEM, and AFM represents pattern shape in quantitative parameters, dependency on user discretion can be eliminated.