Pellicle frame, method of manufacturing a pellicle and pellicle frame

摘要

PROBLEM TO BE SOLVED: To provide a pellicle frame body reducing an occurrence of haze even under irradiation of high-energy light, having light resistance, and excellent in contamination inspection, and to provide a pellicle, and a method for manufacturing the pellicle frame body.SOLUTION: A pellicle frame body 2 is formed of an aluminum material into a frame shape and stretchingly supports a pellicle film 3 covering an opening 4. The aluminium material includes 0.5 to 3.0% of Cu, 1.5 to 4.5% of Mg, and 4.0 to 7.0% of Zn, and the aluminium material is anodized by at least one electrolyte selected from a phosphate compound, a boric acid compound, a saturated dicarboxylic acid compound, an oxy-monocarboxylic acid compound, a malic acid, tartronic acid, and a group comprising salts thereof, to form an anodic oxide film P on the surface. At least one type or more of Ni, Co, Cu, Sn, Fe, Pb, Ca, Zn, and Mg are electrolytically deposited on the anodic oxide film P.