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Method of coating a micro-mechanical parts while maintaining a high friction performance to be applied to the micro-mechanical system
Method of coating a micro-mechanical parts while maintaining a high friction performance to be applied to the micro-mechanical system
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机译:在保持高摩擦性能的同时涂覆微机械零件的方法将应用于微机械系统
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摘要
Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate component to be coated; providing said component with a diamond coating; wherein diamond coating is provide by CVD in a reaction chamber and during CVD deposition, during the last portion of the growth process, a controlled change of the carbon content within the reaction chamber is provided, thereby providing a change of the sp2/sp3 carbon bonds in the vicinity of the surface. Corresponding micromechanical components are also provided.
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