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SEMICONDUCTOR DEVICE AND DISPLAY DEVICE HAVING THE SAME

机译:具有相同功能的半导体设备和显示设备

摘要

A change in electrical characteristics can be inhibited and reliability can be improved in a semiconductor device using a transistor including an oxide semiconductor. A semiconductor device includes a transistor which includes a gate electrode, a first insulating film over the gate electrode, an oxide semiconductor film over the first insulating film, a source electrode electrically connected to the oxide semiconductor film, and a drain electrode electrically connected to the oxide semiconductor film. A second insulating film is provided over the transistor, and a protective film is provided over the second insulating film. The second insulating film includes oxygen. The protective film includes at least one of metal elements used for the oxide semiconductor film.
机译:在使用包括氧化物半导体的晶体管的半导体器件中,可以抑制电特性的变化并且可以提高可靠性。半导体器件包括:晶体管,其包括栅电极;在栅电极之上的第一绝缘膜;在第一绝缘膜之上的氧化物半导体膜;电连接至氧化物半导体膜的源电极;以及电连接至栅电极的漏电极。氧化物半导体膜。在晶体管上方提供第二绝缘膜,并且在第二绝缘膜上方提供保护膜。第二绝缘膜包括氧。保护膜包括用于氧化物半导体膜的金属元素中的至少一种。

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