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Combining normal-incidence reflectance and transmittance with non-normal-incidence reflectance for model-free characterization of single-layer films
Combining normal-incidence reflectance and transmittance with non-normal-incidence reflectance for model-free characterization of single-layer films
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机译:将法向入射反射率和透射率与非法向入射反射率结合起来,可以对单层膜进行无模型表征
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摘要
Optical systems and methods are described that provide greater solving power for thin-film measurements in general, and provide a unique model-free solution for single-layer films in particular.
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