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Drawing apparatus, data processing method, and method of manufacturing article that transform partially overlapping regions using different transformation rules
Drawing apparatus, data processing method, and method of manufacturing article that transform partially overlapping regions using different transformation rules
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机译:使用不同的变换规则来变换部分重叠区域的绘图设备,数据处理方法和制造方法
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摘要
A drawing apparatus performs drawing on a first partial region and a second partial region. The first and second partial regions having an overlap region in which the first and second partial regions overlap each other. The apparatus includes a transformation device configured to transform first pattern data for the first partial region into first quantized pattern data in accordance with a first transformation rule, and to transform second pattern data for the second partial region into second quantized pattern data in accordance with a second transformation rule different from the first transformation rule, and a controller configured to control the drawing on the first partial region based on the first quantized pattern data, and to control the drawing on the second partial region based on the second quantized pattern data.
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