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MODIFIED POLYSILAZANE FILM AND METHOD FOR PRODUCING GAS BARRIER FILM
MODIFIED POLYSILAZANE FILM AND METHOD FOR PRODUCING GAS BARRIER FILM
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机译:改性聚硅氮烷薄膜及其制备气体阻挡薄膜的方法
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摘要
Provided are a modified polysilazane film that is preferable as an intermediate material for forming a predetermined gas barrier film, and a method for producing a gas barrier film having excellent gas barrier properties using such modified polysilazane film as an intermediate material. A modified polysilazane film comprising a substrate and a modified polysilazane layer formed thereon, and a method for producing a gas barrier film obtained through such intermediate material, wherein the modified polysilazane layer has a thickness of a value in the range of 10 to 500 nm, and the modified polysilazane layer has a refractive index of a value in the range of 1.48 to 1.63.
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