Preparing method of polycrystal lead titanate thick film and the polycrystal lead titanate thick film thereby

摘要

The purpose of the present invention, a polycrystalline lead titanate thick films prepared by this method and lead titanate thick film of poly to provide. To this end, the invention is titania (TiO ₂ ) from a lead titanate powder and lead oxide (PbO) powder (PbTiO ₃ ) to prepare a powder (Step 1) ; Sol on the desired substrate using a lead titanate powder prepared in step 1-gel method, at room temperature powder spraying, sputtering and coated by the method of one selected from the group consisting of chemical vapor deposition method to form a nucleation layer (step 2); Provides a method of producing a thick film including a polycrystalline lead titanate; and the step of growing a thick lead titanate from the nucleation layer (Step 3) in Step 2. Polycrystalline lead titanate thick film made in accordance with the present invention is a sol-gel method, spraying powder at room temperature, was coated by the method of one selected from the group consisting of sputtering, and chemical vapor deposition method according to the growth Sikkim film after forming the nucleation layer By improving the crystallinity of the high temperature heat treatment is improved without the adhesive properties and electrical properties of the lead titanate thick film, thereby improving the reliability and the electric energy storage density of the fabricated device In fabricating the device using the polycrystalline film of the thin-film dielectric material superior performance , a piezoelectric material, there is an effect that can be produced on the basis of elements of the sensor and the actuator. ;